公开(公告)号：US5332535A

公开(公告)日：1994-07-26

申请号：US54319

申请日：1993-04-30

申请人： Taisuke Oguchi ,  Hiroaki Hanafusa ,  Juichi Noda ,  Yamada Noriyoshi ,  Shiro Nishi ,  Nobuo Tomita

发明人： Taisuke Oguchi ,  Hiroaki Hanafusa ,  Juichi Noda ,  Yamada Noriyoshi ,  Shiro Nishi ,  Nobuo Tomita

IPC分类号： G02B5/28 ,  G02B6/34 ,  B29D11/00

CPC分类号： G02B5/285 ,  G02B6/12007 ,  G02B6/29361 ,  G02B6/2937 ,  G02B6/2938 ,  G02B2006/12109 ,  Y10T428/31721

摘要： A dielectric multilayer filter applicable to optical communication systems is disclosed, as is a fabrication method therefor, and an optical element incorporating the same. The disclosed dielectric multilayer filter includes a fluorinated polyimide base layer with a dielectric multilayer formed thereover. According to the disclosed fabrication method, a fluorinated polyimide layer is formed by applying liquid fluorinated polyimide material over a smooth surface to a predetermined thickness followed by drying and hardening, after which a dielectric multilayer is formed over the fluorinated polyimide layer by an ion assist vapor deposition method, and then stripping the fluorinated polyimide layer away from the underlying smooth surface. The disclosed dielectric multilayer filter can be easily and economically produced at a suitably small thickness with no need for grinding, exhibits highly uniform physical and optical properties, and is exceedingly durable and resistant to curling and warping.

摘要翻译： 公开了适用于光通信系统的电介质多层滤波器及其制造方法，以及包含该电介质多层滤波器的光学元件。 所公开的电介质多层滤波器包括其上形成有电介质多层的氟化聚酰亚胺基层。 根据所公开的制造方法，通过将液态氟化聚酰亚胺材料在光滑表面上施加到预定厚度然后进行干燥和硬化来形成氟化聚酰亚胺层，然后通过离子辅助蒸气在氟化聚酰亚胺层上形成电介质多层 沉积法，然后将氟化聚酰亚胺层从下面的平滑表面剥离。 公开的电介质多层过滤器可以在适当小的厚度下容易且经济地生产，不需要研磨，表现出高度均匀的物理和光学性能，并且是非常耐用的并且耐卷曲和翘曲。