公开(公告)号：US08689359B2

公开(公告)日：2014-04-01

申请号：US12666745

申请日：2008-06-26

申请人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna ,  Jerzy Mielczarski ,  Yanko Sarov

发明人： Ivo W. Rangelow ,  Tzvetan Ivanov ,  Burkhard Volland ,  Teodor Gotszalk ,  Miroslaw Woszczyna ,  Jerzy Mielczarski ,  Yanko Sarov

IPC分类号： G01Q20/04 ,  G01Q70/10 ,  G01Q60/26 ,  G01Q70/06 ,  G01Q70/12

CPC分类号： G01Q20/04 ,  G01Q10/045 ,  G01Q10/065 ,  G01Q60/26 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/12

摘要： The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.

摘要翻译： 本发明涉及一种用于研究不同材料的表面性质的装置和方法，其使得可以以简化和更快的剪切力方法进行原子力显微镜。 根据本发明的装置的特征在于相对于样品的表面垂直定向自动致动悬臂的测量头。 压阻传感器和双压电晶片致动器优选地被直流隔离。 测量头是特别是碳纳米管的形式。 多个悬臂可以以悬臂阵列的形式布置，其特征在于单独的预弯曲悬臂的梳状布置。 根据本发明的方法通过快速反馈信号来区分，因为使用供应致动器的DC信号的变化来调节测量尖端和待研究表面之间的距离。