公开(公告)号：US20130075053A1

公开(公告)日：2013-03-28

申请号：US13701972

申请日：2011-06-17

Applicant: Jinwei Dong ,  Yanping Zhao ,  Xingmei Zhao ,  Hua Zhong ,  Song Lin

Inventor： Jinwei Dong ,  Yanping Zhao ,  Xingmei Zhao ,  Hua Zhong ,  Song Lin

IPC: F28D20/00

CPC classification number: F28D20/0056 ,  F27B17/0025 ,  H01L21/67098 ,  Y02E60/142

Abstract: The invention provides a heat retention barrel and a vertical heat treatment apparatus provided with the heat retention barrel. The heat retention barrel is used for supporting the wafer boat and comprises a barrel body and a barrel base. The external rim of the bottom of the barrel body is located within the upper surface of the barrel base. The pollution of the particles in the heat retention barrel to the reaction chamber of the vertical heat treatment apparatus can be eliminated through the portion of the upper surface of the barrel base outside the external rim. The selection of the materials for the heat retention barrel can increase the heat retention and heat insulation effects as well as the use safety.

Abstract translation: 本发明提供了具有保温筒的保温筒和立式热处理装置。 保温筒用于支撑晶片舟，并包括筒体和筒形基座。 筒体的底部的外缘位于筒体的上表面内。 可以通过筒外底部外表面的外表面的部分，将热保留筒中的颗粒污染到垂直热处理装置的反应室。 保温筒材料的选择可以增加保温和隔热效果以及使用安全性。