摘要:
A velocity detection apparatus detects a position of a moving object at a first timing and a second timing to detect a velocity of the moving object based on a difference between the first timing and the second timing. The first timing is a timing at which an identifiable mark position of the moving object is detected by a first detector and the second timing is a timing at which the mark position is detected by a second detector. The velocity detection apparatus includes a light source and first and second detectors which detects the mark position based on light obtained by illuminating the moving object using the light source. A vertical projection position of the light source onto a plane which is parallel to a main surface of the first or second detector is located between vertical projection positions of the first and the second detector onto the plane.
摘要:
A displacement detection apparatus includes a scale 115 on which marks are disposed, first and second position detection sensors 111 and 112 detecting positions of the marks 110, and a processor 409 performing a calculation processing of an output signal from each of the first and second position detection sensors 111 and 112. The first and second position detection sensors 111 and 112 are disposed at a distance L from each other to be movable relative to the scale 115. The processor 409 calculates a correction value P′ of a mark pitch P of the marks 110 using the distance L, a first time TPK required for K marks of the marks 110 to pass a detection position, and a second time TL required for a specific mark of the marks 110, which are measured at the same time of the first time TPK, to move the distance L.
摘要:
A displacement detection apparatus includes a scale 115 on which marks are disposed, first and second position detection sensors 111 and 112 detecting positions of the marks 110, and a processor 409 performing a calculation processing of an output signal from each of the first and second position detection sensors 111 and 112. The first and second position detection sensors 111 and 112 are disposed at a distance L from each other to be movable relative to the scale 115. The processor 409 calculates a correction value P′ of a mark pitch P of the marks 110 using the distance L, a first time TPK required for K marks of the marks 110 to pass a detection position, and a second time TL required for a specific mark of the marks 110, which are measured at the same time of the first time TPK, to move the distance L.
摘要:
A velocity detection apparatus detects a position of a moving object at a first timing and a second timing to detect a velocity of the moving object based on a difference between the first timing and the second timing. The first timing is a timing at which an identifiable mark position of the moving object is detected by a first detector and the second timing is a timing at which the mark position is detected by a second detector. The velocity detection apparatus includes a light source and first and second detectors which detects the mark position based on light obtained by illuminating the moving object using the light source. A vertical projection position of the light source onto a plane which is parallel to a main surface of the first or second detector is located between vertical projection positions of the first and the second detector onto the plane.
摘要:
A displacement measuring apparatus including: a first light detector including a first emitter illuminating optically identifiable marks disposed on a moving body, and a first light receiver detecting light through the marks; a second light detector including a second emitter illuminating the marks and a second light receiver detecting light through the marks, wherein the second light detector is arranged at a predetermined interval from the first light detector in a moving direction of the moving body; an identical point detecting unit detecting a first timing at which the first and second light detector detecting an identical mark among the marks, and a second timing; a velocity calculating unit calculating a velocity of the moving body by using the first and second timing determined by the identical point detecting unit; and a time-sharing light emitting unit allowing the first and second emitter to emit the light in a time-sharing manner.
摘要:
A force sensor includes a base unit, an elastic supporting unit, an action unit supported by the elastic supporting unit, and a detection unit that detects at least one of an external force acting on the action unit and a moment acting on the action unit. The detection unit includes a light source, a diffraction grating, a photodetector array that receives an interference image formed by light that has been emitted from the light source and diffracted by the diffraction grating and outputs signals having different phases, and a calculation unit that calculates a displacement of the action unit with respect to the base unit on the basis of the signals and calculates at least one of the external force and the moment acting on the action unit on the basis of the displacement.
摘要:
A displacement measuring apparatus including: a first light detector including a first emitter illuminating optically identifiable marks disposed on a moving body, and a first light receiver detecting light through the marks; a second light detector including a second emitter illuminating the marks and a second light receiver detecting light through the marks, wherein the second light detector is arranged at a predetermined interval from the first light detector in a moving direction of the moving body; an identical point detecting unit detecting a first timing at which the first and second light detector detecting an identical mark among the marks, and a second timing; a velocity calculating unit calculating a velocity of the moving body by using the first and second timing determined by the identical point detecting unit; and a time-sharing light emitting unit allowing the first and second emitter to emit the light in a time-sharing manner.
摘要:
A force sensor includes a base unit, an elastic supporting unit, an action unit supported by the elastic supporting unit, and a detection unit that detects at least one of an external force acting on the action unit and a moment acting on the action unit. The detection unit includes a light source, a diffraction grating, a photodetector array that receives an interference image formed by light that has been emitted from the light source and diffracted by the diffraction grating and outputs signals having different phases, and a calculation unit that calculates a displacement of the action unit with respect to the base unit on the basis of the signals and calculates at least one of the external force and the moment acting on the action unit on the basis of the displacement.