公开(公告)号：US20080088301A1

公开(公告)日：2008-04-17

申请号：US11536971

申请日：2006-09-29

申请人： Yie Wei Tan ,  Pak Kee Choo ,  Chong Wei Chua

发明人： Yie Wei Tan ,  Pak Kee Choo ,  Chong Wei Chua

IPC分类号： G01R31/28

CPC分类号： G01R31/2874 ,  G01R31/2867

摘要： A semiconductor testing handler includes a chamber, at least one chuck attached within the chamber, and a plurality of heating elements disposed to place heat into the chamber. The semiconductor testing handler also includes an air handler disposed to move air through the chamber, and at least one temperature sensor positioned on the inside of the chamber. The semiconductor testing handler also has a control mechanism. A signal from the at least one temperature sensor is input to the control mechanism. The control mechanism controls the plurality of heating elements and the air handler to control the temperature of the chamber.

摘要翻译： 半导体测试处理器包括一个室，至少一个夹在该室内的附件，以及多个加热元件，其设置成将热量放置在该室中。 半导体测试处理器还包括设置成将空气移动通过室的空气处理器和位于室内部的至少一个温度传感器。 半导体测试处理器也具有控制机制。 来自至少一个温度传感器的信号被输入到控制机构。 控制机构控制多个加热元件和空气处理器以控制室的温度。