-
公开(公告)号:US20110132768A1
公开(公告)日:2011-06-09
申请号:US12659971
申请日:2010-03-26
Applicant: Sen-Yeu Yang , Tzu-Chien Huang , Jing-Tang Wu , Hsin-Chun Lai , Ying-Ta Chu
Inventor: Sen-Yeu Yang , Tzu-Chien Huang , Jing-Tang Wu , Hsin-Chun Lai , Ying-Ta Chu
IPC: C25D5/02
CPC classification number: C25D11/045 , B41F13/00 , B82Y10/00 , B82Y40/00 , C25D11/00 , G03F7/0002
Abstract: The invention relates to a forming method for imprinting roller. A photoresist layer is coated on an aluminum roller with cylindrical surface. After a pattern is transferred on the photoresist layer, the photoresist layer with the pattern is formed on the aluminum roller. Then the anodic oxidization treatment conducted for the photoresist layer with the pattern on the aluminum roller. Repeat the above-mentioned steps to obtain the roller with nanopore structure. When the roll-to-roll process is applied, the motherboard of roller with arbitrary size can be formed to facilitate the transfer printing of large area.
Abstract translation: 本发明涉及一种压印辊的成型方法。 光致抗蚀剂层涂覆在具有圆柱形表面的铝辊上。 在光致抗蚀剂层上转印了图案后,在铝辊上形成具有图案的光致抗蚀剂层。 然后对铝辊上的图案对光致抗蚀剂层进行阳极氧化处理。 重复上述步骤以获得具有纳米孔结构的辊。 当使用卷对卷工艺时,可以形成任意尺寸的辊子的主板,以便于大面积的转印。