公开(公告)号：US20070144559A1

公开(公告)日：2007-06-28

申请号：US11611524

申请日：2006-12-15

申请人： Kwang-Shin Lim ,  Sung-Jae Han ,  Yong-Hoon Lee ,  Hyung-Seok Choi ,  Ju-Ah Ryu ,  Yong-Joo Choi

发明人： Kwang-Shin Lim ,  Sung-Jae Han ,  Yong-Hoon Lee ,  Hyung-Seok Choi ,  Ju-Ah Ryu ,  Yong-Joo Choi

IPC分类号： B08B3/00 ,  B08B3/04

CPC分类号： B08B3/04 ,  H01L21/67051 ,  H01L21/67751 ,  H01L21/68707

摘要： A unit for preventing a substrate from drying includes a transfer arm for transferring a substrate from a first bath containing a first cleaning solution to a second bath containing a second cleaning solution, a spraying part connected to the transfer arm, wherein the spraying part sprays a drying prevention solution from an upper portion of the substrate to a lower portion of the substrate, and a drainage container connected to the transfer arm, wherein the drainage container receives the drying prevention solution.

摘要翻译： 用于防止基材干燥的单元包括用于将基材从含有第一清洗溶液的第一浴转移到含有第二清洗溶液的第二浴的转移臂，连接到转移臂的喷射部分，其中喷雾部分喷雾 从所述基板的上部到所述基板的下部的防干燥溶液和与所述输送臂连接的排水容器，其中所述排水容器接收所述干燥防止溶液。