公开(公告)号：US06878210B2

公开(公告)日：2005-04-12

申请号：US09883232

申请日：2001-06-19

申请人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

发明人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

IPC分类号： C23C14/50 ,  C23C14/24 ,  C23C16/458 ,  H01L21/00 ,  C23C16/00

CPC分类号： C23C14/505

摘要： A surface treating holder includes a wire which is coiled at distances in such a manner that it is formed as a spring-like tubular structure having spiral-line faces at opposite ends thereof, so that works are accommodated in the tubular structure. A process for surface-treating a pluarlity of works accommodates the works in the holder, and surface treating the works in the holder while being rotated about an axis of the works.

摘要翻译： 表面处理保持器包括线材，该线材以这样的方式卷绕，使得其形成为在其相对端处具有螺旋线面的弹簧状管状结构，使得工程容纳在管状结构中。 用于表面处理工程的方法可容纳保持器中的工件，并且在围绕工件的轴线旋转的同时对保持器中的工件进行表面处理。

公开(公告)号：US06821560B2

公开(公告)日：2004-11-23

申请号：US09883334

申请日：2001-06-19

申请人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

发明人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

IPC分类号： C23C1450

CPC分类号： C23C14/505

摘要： A surface-treating support member for supporting a plurality of works, including an upper cage and a lower cage including a plurality of compartments, so that the cages are openable and closeable in a lengthwise direction. A process for surface-treating a plurality of works rotates the works about their axes using the support member.

摘要翻译： 一种用于支撑多个工件的表面处理支撑构件，包括具有多个隔室的上保持架和下保持架，使得所述保持架能够沿长度方向打开和关闭。 用于表面处理多个作品的处理使用支撑构件围绕其轴旋转作品。

公开(公告)号：US06280792B1

公开(公告)日：2001-08-28

申请号：US09407304

申请日：1999-09-29

申请人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

发明人： Yoshimi Tochishita ,  Yoshio Fujiwara ,  Yoshihiro Asagai ,  Ken Ohtagaki

IPC分类号： C23C1644

CPC分类号： C23C14/505

摘要： A process for surface-treating a plurality of works which includes the step of surface-treating the works in a treating chamber, while rotating the works about their axes in spaced apart states, wherein the surface treatment is a vapor deposition on a sintered article and the support member includes plate-like elements openably and closably foldable in a lengthwise direction, the plate-like elements defining a plurality of narrow sections each having a length in opened states corresponding to an inside diameter of a work. The support member may also include an upper cage and a lower cage which are openable and closable in a lengthwise direction.

摘要翻译： 一种用于表面处理多个工件的方法，其包括在处理室中对工件进行表面处理的步骤，同时围绕其轴线间隔开的状态旋转工件，其中表面处理是在烧结制品上的气相沉积， 支撑构件包括沿长度方向可开启和关闭地折叠的板状元件，板状元件限定多个狭窄部分，每个狭窄部分具有对应于工件内径的打开状态的长度。 支撑构件还可以包括在长度方向上可打开和关闭的上保持架和下保持架。