公开(公告)号：US4524277A

公开(公告)日：1985-06-18

申请号：US455941

申请日：1982-12-16

申请人： Yoshimasa Shimura ,  Hideyuki Kakiuchi ,  Yoshihisa Minamikawa ,  Katsuhiro Kawasaki

发明人： Yoshimasa Shimura ,  Hideyuki Kakiuchi ,  Yoshihisa Minamikawa ,  Katsuhiro Kawasaki

IPC分类号： H01J37/04 ,  H01J37/15 ,  H01J37/28 ,  H01J37/304 ,  H01J37/305 ,  H01L21/027 ,  G01K1/08 ,  H01J3/00

CPC分类号： H01J37/15 ,  H01J37/304

摘要： A charged particle beam apparatus in which a beam of charged particles emitted from a beam source is focussed on a target in a predetermined size and shape through a plurality of aperture members. Each of the aperture members is combined with a respective deflecting unit which effects a two-dimensional scan with the charged particle beam in response to a scan signal supplied thereto. The center axis of the aperture formed in the aperture member is arithmetically determined on the basis of time-based variation in the quantity of the charged particles trapped by the aperture member during the scan operation. Further, deviation of the arithmetically determined center axis of the aperture from a reference axis is determined. The aperture member is slided on a plane extending perpendicularly to the center axis of the aperture to cancel out the deviation.

摘要翻译： 一种带电粒子束装置，其中从束源发射的带电粒子束通过多个孔径构件以预定尺寸和形状聚焦在靶上。 每个孔径构件与相应的偏转单元组合，其响应于提供给其的扫描信号，利用带电粒子束进行二维扫描。 基于在扫描操作期间由孔构件捕获的带电粒子的量的时间变化，算术地确定在孔构件中形成的孔的中心轴线。 此外，确定孔径的算术确定的中心轴线与参考轴线的偏差。 孔径构件在垂直于孔的中心轴延伸的平面上滑动以抵消偏差。

公开(公告)号：US4362386A

公开(公告)日：1982-12-07

申请号：US208076

申请日：1980-11-18

申请人： Hajime Matsushita ,  Yoshimasa Shimura

发明人： Hajime Matsushita ,  Yoshimasa Shimura

IPC分类号： G01N33/49 ,  G01N15/00 ,  G01N15/02 ,  G01N21/59 ,  G02B7/28 ,  G02B21/00 ,  G06K9/00 ,  G06M11/04 ,  G01N33/48

CPC分类号： G02B21/00 ,  G01N21/5911 ,  G06K9/00127 ,  G06M11/04

摘要： After a slide glass having blood smeared thereon has been mounted on a movable stage of a microscope, the stage is moved to position a view field of the microscope to the center of the slide glass. Then, the stage is moved in one direction along the length of the slide glass. The view field of the microscope moves as the stage is moved so that red blood corpuscle densities on the smear are measured sequentially along the length of the slide glass. Based on the measurement a computer determines an optimum test area on the smear for the recognition of white blood corpuscles and the stage is moved to a start position of the optimum test area by an instruction from the computer. Thereafter, a normal stage scan operation for detecting the white blood corpuscles is carried out and the detected white blood corpuscles are automatically classified.

摘要翻译： 在其上涂抹有血迹的载玻片已经安装在显微镜的可移动台上后，移动台架以将显微镜的视野放置在载玻片的中心。 然后，台架沿着载玻片的长度在一个方向上移动。 显微镜的视野随着舞台的移动而移动，从而沿着载玻片的长度顺序测量涂片上的红色血球密度。 基于测量，计算机确定用于识别白血球的涂片上的最佳测试区域，并且通过来自计算机的指令将平台移动到最佳测试区域的开始位置。 此后，执行用于检测白血球的正常扫描操作，并且检测到的白血球被自动分类。