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公开(公告)号：US4390391A
公开(公告)日：1983-06-28
申请号：US384114
申请日：1982-06-01
CPC分类号： C03C23/002 , C03C15/00
摘要： A method for irradiating a chemically machinable light-sensitive glass plate with a parallel bundle of ultraviolet rays so as to form a tappered polygonal hole in the glass plate. A mask having a regular polygonal opening having n vertexes is mounted on a machinable light-sensitive glass plate and a light source capable of generating a parallel bundle of ultraviolet is disposed so that one of the vertexes of the polygonal opening is positioned at the longest point from the center of the light source. The glass plate is then irradiated. Thereafter, the light source is rotated about a center axis of the opening by an angle equal to 360.degree./n and the glass plate is re-irradiated. This procedure is conducted so that the glass plate is irradiated n times.
摘要翻译： 一种用化学机械加工的感光玻璃板照射紫外线的方法，以便在玻璃板中形成一个多边形的多孔孔。 具有n个顶点的具有正多边形开口的掩模安装在可加工的感光玻璃板上，并且能够产生平行的紫外线束的光源被设置为使得多边形开口中的一个顶点位于最长点 从光源的中心。 然后照射玻璃板。 此后，光源围绕开口的中心轴线旋转等于360°/ n的角度，并且玻璃板被再次照射。 进行该步骤，使玻璃板照射n次。
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公开(公告)号：US4444616A
公开(公告)日：1984-04-24
申请号：US384111
申请日：1982-06-01
IPC分类号： G03B27/02 , C03B33/00 , C03C15/00 , C03C23/00 , G03B27/04 , G03F7/20 , H01J17/49 , B44C1/22 , C03C25/06
CPC分类号： H01J17/49 , C03C15/00 , C03C23/002 , G03F7/201
摘要： A method for irradiating a chemically machinable light-sensitive glass plate with a parallel bundle of ultraviolet rays so as to form tapered holes or slits in the glass plate. A mask having a desired shaped opening is mounted on the light-sensitive glass plate and the plate is disposed so that its surface forms a predetermined angle with a plane which is perpendicular to the parallel bundle of ultraviolet rays. The glass plate is then rotated about a central vertical axis thereof.
摘要翻译： 照射具有平行紫外线束的化学机械加工的感光玻璃板以在玻璃板中形成锥形孔或狭缝的方法。 具有所需形状的开口的掩模安装在感光玻璃板上，并且板被设置成使其表面与垂直于平行的紫外线束的平面形成预定角度。 然后将玻璃板围绕其中心垂直轴旋转。
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