Semiconductor manufacturing apparatus having a movable-area covering
mechanism
    2.
    发明授权
    Semiconductor manufacturing apparatus having a movable-area covering mechanism 失效
    具有可移动覆盖机构的半导体制造装置

    公开(公告)号:US5201804A

    公开(公告)日:1993-04-13

    申请号:US749295

    申请日:1991-08-23

    CPC classification number: B23Q11/085 H01L21/68

    Abstract: A covering mechanism for covering an area in which a movable table, etc. of, for example, semiconductor assembling machines using a flexible sheet cover that has elasticity. One end of the cover is fastened to a take-up shaft and the other end to a movable member that moves over the movable table, etc. in the direction perpendicular to the take-up shaft. The cover wrapped around the take-up shaft is stretched out when the movable member is moved away from the take-up shaft, thus covering the table. When the movable member is moved towards the take-up shaft, the cover, with the elasticity, is back to be wrapped around the take-up shaft. By arranging a plurality of take-up shafts at right angles, the covers can stretch in the directions perpendicular to each other, thus covering a wider area in which an X-Y table is moved around.

    Abstract translation: 一种覆盖机构,用于覆盖使用具有弹性的柔性片盖的例如半导体组装机的可移动台等的区域。 盖的一端固定在卷取轴上,另一端固定在与卷取轴垂直的方向上移动到可动台等上的可动件上。 当可动件远离卷取轴移动时,卷绕在缠绕轴上的盖被拉伸,从而覆盖在桌子上。 当可移动部件朝向卷取轴移动时,具有弹性的盖子将被卷绕在卷绕轴上。 通过将多个卷取轴成直角地布置,盖可以在彼此垂直的方向上拉伸,从而覆盖X-Y台移动的更宽的区域。

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