公开(公告)号：US20090242887A1

公开(公告)日：2009-10-01

申请号：US12413318

申请日：2009-03-27

申请人： Tetsuya YAMAMOTO ,  Naoki YAMAMOTO ,  Hisao MAKINO ,  Akira UJIHARA ,  Yoshinori HIRASHIMA ,  Hiroaki IWAOKA ,  Hisashi AOKI ,  Hitoshi HOKARI ,  Motohiko YOSHIDA

发明人： Tetsuya YAMAMOTO ,  Naoki YAMAMOTO ,  Hisao MAKINO ,  Akira UJIHARA ,  Yoshinori HIRASHIMA ,  Hiroaki IWAOKA ,  Hisashi AOKI ,  Hitoshi HOKARI ,  Motohiko YOSHIDA

IPC分类号： H01L33/00 ,  H01L21/28 ,  C23C14/32

CPC分类号： G02F1/13439 ,  C23C14/086 ,  C23C14/34 ,  C23C14/3485 ,  H01L51/5215

摘要： A display substrate is disclosed comprising: a supporting substrate; an organic resin layer formed on the supporting substrate; and a transparent electrode formed on the organic resin layer, wherein the transparent electrode includes: a first layer containing a zinc oxide and formed in close contact with the organic resin layer; and a second layer containing a zinc oxide and which has a thickness thicker than a thickness of the first layer and is formed on the first layer, wherein the first layer is deposited by either one of a DC sputtering and a DC magnetron sputtering, and the second layer is deposited by any one of a radio frequency sputtering, a radio frequency magnetron sputtering, a radio frequency superimposing a DC sputtering, and a radio frequency superimposing a DC magnetron sputtering, and the display substrate is available, for example, as the substrate having a transparent electrode for counter electrode of liquid crystal display device.

摘要翻译： 公开了一种显示基板，包括：支撑基板; 形成在所述支撑基板上的有机树脂层; 和形成在有机树脂层上的透明电极，其中透明电极包括：含有氧化锌并与有机树脂层紧密接触形成的第一层; 和含有氧化锌的第二层，其厚度比第一层的厚度厚，并且形成在第一层上，其中第一层通过DC溅射和DC磁控溅射中的任一种沉积，并且 第二层通过射频溅射，射频磁控溅射，射频叠加DC溅射和叠加DC磁控溅射的射频中的任一种沉积，并且显示基板可用作例如基板 具有用于液晶显示装置的对电极的透明电极。