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公开(公告)号：US08307778B2
公开(公告)日：2012-11-13
申请号：US12375267
申请日：2007-07-05
IPC分类号： B05C5/02
CPC分类号： H01L21/6715
摘要： Jet lines C1, C3, C5, . . . extending in an X-direction and suction lines C2, C4, C6, . . . extending in the X-direction are arranged alternately at a fixed pitch W in a Y-direction. Jet openings 88 are arranged at fixed intervals 3D on the jet lines C2n−1, suction openings 90 are arranged at fixed intervals 3D on the suction lines C2n, and the jet openings 88 and the suction openings 90 on the adjacent ones of the jet lines C2n−1 and the suction lines C2n are spaced apart from each other by a fixed distance D with respect to the X-direction. Slots 88a and 90a are extended straight from the upper ends of the jet openings 88 and the upper ends of the suction openings 90, respectively, in a carrying direction (the X-direction) and a direction opposite the carrying direction.
摘要翻译： 喷射线C1，C3，C5，。 。 。 在X方向上延伸并且吸入线C2，C4，C6。 。 。 在X方向上延伸的方向以Y方向的固定间距W交替排列。 喷射开口88以喷射线C2n-1上的固定间隔3D布置，吸入口90以吸引线C2n上的固定间隔3D布置，并且喷射开口88和相邻喷射线上的吸入口90 C2n-1和吸引线C2n相对于X方向彼此间隔开固定距离D. 狭槽88a和90a分别沿着输送方向（X方向）和与输送方向相反的方向从喷射口88的上端和吸入口90的上端直线延伸。
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公开(公告)号：US08272452B2
公开(公告)日：2012-09-25
申请号：US12602870
申请日：2008-05-23
IPC分类号： B25D11/04
CPC分类号： B25D11/005 , B25D2211/061 , B25D2250/201 , B25D2250/221
摘要： A hammering tool includes, within its tool main body, a piston which reciprocates by using a motor as its drive force, a hammering member which carries out its hammering operation in linking with the reciprocating motion of the piston, and an intermediate member which transmits a hammering force of the hammering member to a top end tool mounted on the top end of the tool main body. The tool main body further includes a measuring device which measures a hammering state of the hammering member and a control device which controls the number of rotations of the motor. The control device, according to measurement results of the measuring device, determines the limit number of times of hammering where the hammering member becomes unable to follow the reciprocating motion of the piston, and thus controls the number of rotations of the motor.
摘要翻译： 锤击工具在其工具主体内包括通过使用电动机作为其驱动力往复运动的活塞，与活塞的往复运动连动的锤击操作的锤击构件和传递 锤击构件对安装在工具主体顶端上的顶端工具的锤击力。 工具主体还包括测量锤击构件的锤击状态的测量装置和控制马达的转数的控制装置。 根据测量装置的测量结果，控制装置确定锤击部件不能跟随活塞的往复运动的限制次数，从而控制电动机的转数。
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公开(公告)号：US20090311434A1
公开(公告)日：2009-12-17
申请号：US12375267
申请日：2007-07-05
CPC分类号： H01L21/6715
摘要： Formation of banded irregularities in a process liquid film formed on a substrate being carried by a flotation carrying system is reduced or suppressed effectively.Jet lines C1, C3, C5, . . . extending in an X-direction and suction lines C2, C4, C6, . . . extending in the X-direction are arranged alternately at a fixed pitch W in a Y-direction. Jet openings 88 are arranged at fixed intervals 3D on the jet lines C2n−1, suction openings 90 are arranged at fixed intervals 3D on the suction lines C2n, and the jet openings 88 and the suction openings 90 on the adjacent ones of the jet lines C2n−1 and the suction lines C2n are spaced apart from each other by a fixed distance D with respect to the X-direction. Slots 88a and 90a are extended straight from the upper ends of the jet openings 88 and the upper ends of the suction openings 90, respectively, in a carrying direction (the X-direction) and a direction opposite the carrying direction.
摘要翻译： 通过浮选运载系统承载的在基板上形成的处理液膜中的带状凹凸的形成被有效地减少或抑制。 喷射线C1，C3，C5，。 。 。 在X方向上延伸并且吸入线C2，C4，C6。 。 。 在X方向上延伸的方向以Y方向的固定间距W交替排列。 喷射开口88以喷射线C2n-1上的固定间隔3D布置，吸入口90以吸引线C2n上的固定间隔3D布置，并且喷射开口88和相邻喷射线上的吸入口90 C2n-1和吸引线C2n相对于X方向彼此间隔开固定距离D. 狭槽88a和90a分别沿着输送方向（X方向）和与输送方向相反的方向从喷射口88的上端和吸入口90的上端直线延伸。
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公开(公告)号：US20110024146A1
公开(公告)日：2011-02-03
申请号：US12602870
申请日：2008-05-23
IPC分类号： B25D11/04
CPC分类号： B25D11/005 , B25D2211/061 , B25D2250/201 , B25D2250/221
摘要： A hammering tool includes, within its tool main body, a piston which reciprocates by using a motor as its drive force, a hammering member which carries out its hammering operation in linking with the reciprocating motion of the piston, and an intermediate member which transmits a hammering force of the hammering member to a top end tool mounted on the top end of the tool main body. The tool main body further includes a measuring device which measures a hammering state of the hammering member and a control device which controls the number of rotations of the motor. The control device, according to measurement results of the measuring device, determines the limit number of times of hammering where the hammering member becomes unable to follow the reciprocating motion of the piston, and thus controls the number of rotations of the motor.
摘要翻译： 锤击工具在其工具主体内包括通过使用电动机作为其驱动力往复运动的活塞，与活塞的往复运动连动的锤击操作的锤击构件和传递 锤击构件对安装在工具主体顶端上的顶端工具的锤击力。 工具主体还包括测量锤击构件的锤击状态的测量装置和控制马达的转数的控制装置。 根据测量装置的测量结果，控制装置确定锤击部件不能跟随活塞的往复运动的限制次数，从而控制电动机的转数。
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