公开(公告)号：US20060284084A1

公开(公告)日：2006-12-21

申请号：US10570198

申请日：2004-09-03

申请人： Takafumi Morimoto ,  Tooru Seinaki ,  Yoshiyuki Nag-No ,  Yukio Kenbou ,  Yuuichi Xunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashirara ,  Kishio Hidaka ,  Tadashi Fujieda

发明人： Takafumi Morimoto ,  Tooru Seinaki ,  Yoshiyuki Nag-No ,  Yukio Kenbou ,  Yuuichi Xunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashirara ,  Kishio Hidaka ,  Tadashi Fujieda

IPC分类号： G21K7/00

CPC分类号： G01Q70/12

摘要： A method of producing a probe by attaching a carbon nanotube etc. to a mounting base end and bonding it there using a carbon film etc., which method of producing a probe eliminates the effects of a carbon contamination film to increase the bonding strength, increases the conductivity of the probe, and strengthens the bonding performance by coating the entire circumference rather than coating one side, the probe, and a scanning probe microscope are provided. The method of producing a probe is a method of producing a probe comprised of a carbon nanotube 12, a mounting base ends 13 holding this carbon nanotube, and a coating film 17 bonding the carbon nanotube to a mounting base, comprising performing the mounting work of the carbon nanotube and mounting base end under observation by a microscope and stripping off the carbon contamination film 14 formed by an electron microscope at a stage before bonding by the coating film.

摘要翻译： 通过使用碳膜等将碳纳米管等附接到安装基端并在其上进行接合来制造探针的方法，制造探针的方法消除了碳污染膜的作用，增加了接合强度，增加了 提供探针的导电性，并且通过涂覆整个周边而不是涂覆一侧，探针和扫描探针显微镜来增强粘合性能。 制造探针的方法是制造由碳纳米管12，保持该碳纳米管的安装基端13和将碳纳米管粘合到安装基底的涂膜17的探针的制造方法，其特征在于， 碳纳米管和安装基端通过显微镜观察，并在通过涂膜粘合之前的阶段剥离由电子显微镜形成的碳污染膜14。