公开(公告)号：US20070275639A1

公开(公告)日：2007-11-29

申请号：US11802867

申请日：2007-05-25

申请人： Tadakazu Miyashita ,  Yosuke Kanai

发明人： Tadakazu Miyashita ,  Yosuke Kanai

IPC分类号： B24B37/04

CPC分类号： H01L21/68714 ,  B24B37/345

摘要： The workpiece centering apparatus is capable of highly reducing damage of a workpiece. The workpiece centering apparatus comprises: a guide plate being provided in a tray and covering a water inlet so as to horizontally introduce water into the tray; and at least three overflow outlets for overflowing the water from the tray, the overflow outlets being formed in a peripheral wall of the tray and arranged in the circumferential direction at regular intervals. The workpiece, which is horizontally fed on a surface of the water stored in the tray, is received and floated by surface tension of the water. Then, the workpiece is centered in the tray by water flows radially overflowing from the tray via the overflow outlets.

摘要翻译： 工件定心装置能够高度减少工件的损伤。 工件定心装置包括：引导板设置在托盘中并覆盖水入口以将水水平地引入托盘; 以及至少三个用于从托盘溢出水的溢流出口，所述溢流口形成在所述托盘的周壁中并且以周期方向以规则的间隔布置。 水平地供给在储存在托盘中的水的表面上的工件被水的表面张力接收并漂浮。 然后，通过溢流出口从托盘径向溢出的水流将工件中心在托盘中。

公开(公告)号：US07524232B2

公开(公告)日：2009-04-28

申请号：US11802867

申请日：2007-05-25

申请人： Tadakazu Miyashita ,  Yosuke Kanai

发明人： Tadakazu Miyashita ,  Yosuke Kanai

IPC分类号： B24B49/00 ,  H01L21/677

CPC分类号： H01L21/68714 ,  B24B37/345

摘要： The workpiece centering apparatus is capable of highly reducing damage of a workpiece. The workpiece centering apparatus comprises: a guide plate being provided in a tray and covering a water inlet so as to horizontally introduce water into the tray; and at least three overflow outlets for overflowing the water from the tray, the overflow outlets being formed in a peripheral wall of the tray and arranged in the circumferential direction at regular intervals. The workpiece, which is horizontally fed on a surface of the water stored in the tray, is received and floated by surface tension of the water. Then, the workpiece is centered in the tray by water flows radially overflowing from the tray via the overflow outlets.

摘要翻译： 工件定心装置能够高度减少工件的损伤。 工件定心装置包括：引导板设置在托盘中并覆盖水入口以将水水平地引入托盘; 以及至少三个用于从托盘溢出水的溢流出口，所述溢流口形成在所述托盘的周壁中并且以周期方向以规则的间隔布置。 水平地供给在储存在托盘中的水的表面上的工件被水的表面张力接收并漂浮。 然后，通过溢流出口从托盘径向溢出的水流将工件中心在托盘中。