公开(公告)号：US5916626A

公开(公告)日：1999-06-29

申请号：US773060

申请日：1996-12-24

申请人： Yun-jeon Moon ,  Seong-il Kim ,  Jeong-suk Kim ,  Won-yeal Sin

发明人： Yun-jeon Moon ,  Seong-il Kim ,  Jeong-suk Kim ,  Won-yeal Sin

IPC分类号： G03F7/38 ,  C23C16/30 ,  C23C16/448 ,  C23C16/52 ,  H01L21/00 ,  H01L21/027 ,  H01L21/223 ,  C23C16/00

CPC分类号： H01L21/67253 ,  C23C16/30 ,  C23C16/4481 ,  C23C16/52 ,  H01L21/67017

摘要： An HMDS supplying apparatus capable of sensing the flow of hexamethyldisilazane through a flowmeter and to control the amount thereof which is flowing, to thereby prevent a lowering of productivity due to inadequate or excessive flow amounts. The HMDS supplying apparatus includes a carrier gas supplier for supplying a carrier gas for HMDS; a container connected to the carrier gas supplier adapted for containing HMDS therein; a flowmeter for controlling the amount of flowing HMDS supplied together with the carrier gas from the container; and an HMDS processor for depositing HMDS supplied via the flowmeter on the surface of a wafer; wherein the apparatus further includes: an indicator for indicating the level of HMDS in the flowmeter; and an optical sensing device having an optical source and an optical sensor, for controlling the flow of HMDS by sensing whether the indicator is located at an optimum position.

摘要翻译： HMDS供给装置能够通过流量计检测六甲基二硅氮烷的流动并控制其流动的量，从而防止由于流量不足或过量而导致的生产率降低。 HMDS供应装置包括用于供应用于HMDS的载气的载气供应器; 连接到适于在其中容纳HMDS的载气供应器供应器的容器; 流量计，用于控制与来自容器的载气一起供给的流动HMDS的量; 以及用于在晶片的表面上沉积经由所述流量计提供的HMDS的HMDS处理器; 其中所述装置还包括：用于指示所述流量计中的HMDS的水平的指示器; 以及具有光源和光学传感器的光学感测装置，用于通过检测指示器是否位于最佳位置来控制HMDS的流动。