公开(公告)号：US5387975A

公开(公告)日：1995-02-07

申请号：US79639

申请日：1993-06-18

申请人： Futoshi Ishida ,  Kiyofumi Hashimoto ,  Toshihide Dohi ,  Takao Kobayashi ,  Yutaka Tokuyama

发明人： Futoshi Ishida ,  Kiyofumi Hashimoto ,  Toshihide Dohi ,  Takao Kobayashi ,  Yutaka Tokuyama

IPC分类号： G01B9/02 ,  G01B11/24 ,  G01B11/255 ,  G01M11/00

CPC分类号： G01B11/255

摘要： An interferometer utilizing interference whose object is the measurement of the configuration of a test surface with high precision by allowing accurate positioning to a predetermined measuring position for the measurement of the configuration of the test surface.The interferometer is equipped with an alignment pattern (4A) which generates a wave front that converges at the predetermined measuring position, as well as a wave front for measuring the configuration corresponding to the design configuration of the test surface (9), and by using a test surface-reflected beam of the wave front generated by the alignment pattern, an alignment observation optical system (8) measures the displacement of the test surface from the predetermined measuring position.

摘要翻译： 干涉仪利用干涉，其目的是通过允许精确定位到预定测量位置以测量测试表面的配置，来高精度地测量测试表面的构造。 干涉仪配备有产生在预定测量位置收敛的波前的对准图案（4A）以及用于测量与测试表面（9）的设计构造对应的配置的波前，并且通过使用 通过对准图案产生的波前的测试表面反射光束，对准观察光学系统（8）测量测试表面从预定测量位置的位移。