公开(公告)号：US08423173B2

公开(公告)日：2013-04-16

申请号：US12833119

申请日：2010-07-09

申请人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

发明人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

IPC分类号： H01L21/677 ,  B65G65/34 ,  G06F19/00 ,  G06F7/00

CPC分类号： H01L21/67772

摘要： A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.

摘要翻译： 公开了一种负载端口装置，其中，尽可能地避免盖构件安装和拆卸装置和映射装置的总操作时间，同时避免两个装置彼此干涉。 在盖构件安装和拆卸装置和映射装置上设置有防干扰传感器装置，并且检测到盖构件安装和拆卸装置的盖构件吸引板被设置在低于超过预定值的值的位置 附接地图传感器的臂能够实现臂的枢转运动，而不会妨碍盖构件吸板。 然后，在通过干扰避免传感器装置检测到预设值之后立即将臂枢转到映射位置以开始映射。

公开(公告)号：US20110005868A1

公开(公告)日：2011-01-13

申请号：US12833119

申请日：2010-07-09

申请人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

发明人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

IPC分类号： B66B1/24 ,  E05F15/00

CPC分类号： H01L21/67772

摘要： A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.

摘要翻译： 公开了一种负载端口装置，其中，尽可能地避免盖构件安装和拆卸装置和映射装置的总操作时间，同时避免两个装置彼此干涉。 在盖构件安装和拆卸装置和映射装置上设置有防干扰传感器装置，并且检测到盖构件安装和拆卸装置的盖构件吸引板被设置在低于超过预定值的值的位置 附接地图传感器的臂能够实现臂的枢转运动，而不会妨碍盖构件吸板。 然后，在通过干扰避免传感器装置检测到预设值之后立即将臂枢转到映射位置以开始映射。