公开(公告)号：US5825847A

公开(公告)日：1998-10-20

申请号：US910816

申请日：1997-08-13

Applicant: Ronald D. Ruth ,  Zhirong Huang

Inventor： Ronald D. Ruth ,  Zhirong Huang

IPC: G03F7/20 ,  H05G2/00 ,  H05H7/06 ,  H01J35/14

CPC classification number: G03F7/70025 ,  H05G2/00 ,  H05H7/06

Abstract: A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.

Abstract translation: 公开了用于x射线光刻等应用的高强度，廉价且准直的x射线源。 存储在高精度谐振器中的大功率激光器的强烈脉冲重复地与聚束电子束几乎正面地碰撞和康普顿背散射，具有相对低的能量并在紧凑的存储环中循环。 激光和电子束都在光谐振器内的相互作用区域紧密聚焦和匹配。 激光 - 电子相互作用不仅在期望的波长下产生x射线，而且可以冷却和稳定电子，以防止存储环中的彼此间的散射和库仑排斥。 这种冷却提供了紧凑，强大的电子束，适用于许多应用。 特别地，该装置可以产生足够量的x射线，以使其成为用于高通量x射线光刻和许多其它应用的优异且灵活的康普顿背散射X射线（CBX）源。

公开(公告)号：US6035015A

公开(公告)日：2000-03-07

申请号：US146202

申请日：1998-09-02

Applicant: Ronald D. Ruth ,  Zhirong Huang

Inventor： Ronald D. Ruth ,  Zhirong Huang

IPC: G03F7/20 ,  H05G2/00 ,  H05H7/06 ,  H01J35/14

CPC classification number: G03F7/70025 ,  H05G2/00 ,  H05H7/06

Abstract: A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.

Abstract translation: 公开了用于x射线光刻等应用的高强度，廉价且准直的x射线源。 存储在高精度谐振器中的大功率激光器的强烈脉冲重复地与聚束电子束几乎正面地碰撞和康普顿背散射，具有相对低的能量并在紧凑的存储环中循环。 激光和电子束都在光谐振器内的相互作用区域紧密聚焦和匹配。 激光 - 电子相互作用不仅在期望的波长下产生x射线，而且可以冷却和稳定电子，以防止存储环中的彼此间的散射和库仑排斥。 这种冷却提供了紧凑，强大的电子束，适用于许多应用。 特别地，该装置可以产生足够量的x射线，以使其成为用于高通量x射线光刻和许多其它应用的优异且灵活的康普顿背散射X射线（CBX）源。