公开(公告)号：US09299907B2

公开(公告)日：2016-03-29

申请号：US13126076

申请日：2009-12-09

Applicant: Ping Fan ,  Dongping Zhang ,  Zhuangghao Zjemg ,  Guangxing Liang

Inventor： Ping Fan ,  Dongping Zhang ,  Zhuangghao Zjemg ,  Guangxing Liang

IPC: H01L35/32 ,  H01L35/34

CPC classification number: H01L35/34 ,  H01L35/32

Abstract: For the thin-film thermo-electric generator and fabrication method of this invention, a P-type thermo-electric thin-film layer, an insulating thin-film layer and a N-type thermo-electric thin-film layer is deposited on a substrate to form a three-layer PN junction, multiple three-layer PN junctions in series are available, an insulating thin-film layer is provided between every to serial three-layer PN junctions, and electrodes are extracted from the substrate and the outermost thin-film layer of the last three-layer thin-film PN junctions. The present invention applies the deposition of P-type thermo-electric thin-film layer, an insulating thin-film layer and a N-type thereto-electric thin-film layer to form a three-layer PN junction, thus a thermo-electric generator is formed, during the deposition of the insulating thin-film layer, intentionally sheltering the substrate and one end of the deposited thin-film layer and depositing the P-type or N-type materials on the substrate and one end of the deposited thin-film layer directly, to form a connection of PN junction or a serial connection between two PN junction, the separate connection of the P-type or N-type materials is not required, simplifying the fabrication processes of the thin-film thermo-electric generator, owning to the function of the thin-film thermo-electric materials and serial connection structure of multiple three-layer PN junctions, the performance of the thin-film thermo-electric generator is greatly improved.

Abstract translation: 对于本发明的薄膜热电发生器和制造方法，将P型热电薄膜层，绝缘薄膜层和N型热电薄膜层沉积在 衬底以形成三层PN结，可以获得串联的多个三层PN结，在每个至串行三层PN结之间提供绝缘薄膜层，并且电极从衬底提取，并且最外层的薄层 - 最后三层薄膜PN结的膜层。 本发明应用P型热电薄膜层，绝缘薄膜层和N型电沉积薄膜层，形成三层PN结，从而形成热电 在绝缘薄膜层的沉积期间形成发生器，有意地遮蔽基板和沉积的薄膜层的一端，并将P型或N型材料沉积在基板上并沉积薄层的一端 膜层直接形成PN结或两个PN结之间的串联连接，不需要P型或N型材料的分​​离连接，简化了薄膜热电制造工艺 发电机，具有薄膜热电材料的功能和多个三层PN结的串联连接结构，薄膜热电发生器的性能大大提高。

公开(公告)号：US20110197942A1

公开(公告)日：2011-08-18

申请号：US13126076

申请日：2009-12-09

Applicant: Ping Fan ,  Dongping Zhang ,  Zhuangghao Zjemg ,  Guangxing Liang

Inventor： Ping Fan ,  Dongping Zhang ,  Zhuangghao Zjemg ,  Guangxing Liang

IPC: H01L35/32 ,  H01L21/20 ,  H01L35/34 ,  B82Y99/00

CPC classification number: H01L35/34 ,  H01L35/32

Abstract: For the thin-film thermo-electric generator and fabrication method of this invention, a P-type thermo-electric thin-film layer, an insulating thin-film layer and a N-type thermo-electric thin-film layer is deposited on a substrate to form a three-layer PN junction, multiple three-layer PN junctions in series are available, an insulating thin-film layer is provided between every to serial three-layer PN junctions, and electrodes are extracted from the substrate and the outermost thin-film layer of the last three-layer thin-film PN junctions. The present invention applies the deposition of P-type thermo-electric thin-film layer, an insulating thin-film layer and a N-type thereto-electric thin-film layer to form a three-layer PN junction, thus a thermo-electric generator is formed, during the deposition of the insulating thin-film layer, intentionally sheltering the substrate and one end of the deposited thin-film layer and depositing the P-type or N-type materials on the substrate and one end of the deposited thin-film layer directly, to form a connection of PN junction or a serial connection between two PN junction, the separate connection of the P-type or N-type materials is not required, simplifying the fabrication processes of the thin-film thermo-electric generator, owning to the function of the thin-film thermo-electric materials and serial connection structure of multiple three-layer PN junctions, the performance of the thin-film thermo-electric generator is greatly improved.

Abstract translation: 对于本发明的薄膜热电发生器和制造方法，将P型热电薄膜层，绝缘薄膜层和N型热电薄膜层沉积在 衬底以形成三层PN结，可以获得串联的多个三层PN结，在每个至串行三层PN结之间提供绝缘薄膜层，并且电极从衬底提取，并且最外层的薄层 - 最后三层薄膜PN结的膜层。 本发明应用P型热电薄膜层，绝缘薄膜层和N型电沉积薄膜层，形成三层PN结，从而形成热电 在绝缘薄膜层的沉积期间形成发生器，有意地遮蔽基板和沉积的薄膜层的一端，并将P型或N型材料沉积在基板上并沉积薄层的一端 膜层直接形成PN结或两个PN结之间的串联连接，不需要P型或N型材料的分​​离连接，简化了薄膜热电制造工艺 发电机，具有薄膜热电材料的功能和多个三层PN结的串联连接结构，薄膜热电发生器的性能大大提高。