公开(公告)号：US20250014869A1

公开(公告)日：2025-01-09

申请号：US18765824

申请日：2024-07-08

Applicant: 6K Inc.

Inventor： Michael C. Kozlowski ,  Michael Resnick ,  Pawel Matys

IPC: H01J37/32

Abstract: Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.

公开(公告)号：US20230411123A1

公开(公告)日：2023-12-21

申请号：US18330602

申请日：2023-06-07

Applicant: 6K Inc.

Inventor： Michael C. Kozlowski ,  Michael Resnick ,  Pawel Matys

IPC: H01J37/32

CPC classification number: H01J37/32449 ,  H01J37/32201

Abstract: Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.

公开(公告)号：US12040162B2

公开(公告)日：2024-07-16

申请号：US18330602

申请日：2023-06-07

Applicant: 6K Inc.

Inventor： Michael C. Kozlowski ,  Michael Resnick ,  Pawel Matys

IPC: H01J37/32

CPC classification number: H01J37/32449 ,  H01J37/32201

Abstract: Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.