公开(公告)号：US20170299788A1

公开(公告)日：2017-10-19

申请号：US15488050

申请日：2017-04-14

Applicant: ACADEMIA SINICA

Inventor： Pei-Kuen WEI ,  En-Hung LIN ,  Shu-Cheng LO ,  Kuang-Li LEE

IPC: G02B5/18 ,  G01J3/02 ,  G01J3/18

CPC classification number: G02B5/1861 ,  G01J3/0221 ,  G01J3/24 ,  G01J2003/1852 ,  G01J2003/1857 ,  G02B5/1852

Abstract: A curved diffraction grating includes a substrate and a metal layer. The substrate is a two-dimensional curved plate structure and has a first surface, a second surface and a plurality of microstructures. The first surface is disposed opposite to the second surface, and the microstructures are disposed on the second surface. Each of the microstructures is a saw-tooth structure and has a clear blazed angle. The metal layer is disposed on the microstructures and has a plurality of diffraction structures corresponding to the microstructures. A spectrometer containing the curved diffraction grating and a manufacturing method of the curved diffraction grating are also disclosed.