公开(公告)号：US20150380206A1

公开(公告)日：2015-12-31

申请号：US14318338

申请日：2014-06-27

Applicant: ADVANCED ION BEAM TECHNOLOGY, INC.

Inventor： Nicholas R. WHITE ,  Kourosh SAADATMAND

IPC: H01J37/147

CPC classification number: H01J37/1472 ,  H01J37/05 ,  H01J37/3171 ,  H01J2237/057

Abstract: A single bend energy filter for controlling deflection of a charged particle beam is provided. It includes a first array of electrodes and a second array of electrodes to define a beam channel for the charged particle beam to pass through; an unmatched steering electrode among the first array of electrodes for tuning the bend angle of the charged particle beam; and a plurality of electrical biases applied to the first array of electrodes, the second array of electrodes and the unmatched steering electrode, wherein portion or all of the electrodes have different shapes. A method for controlling deflection of a charged particle beam is also provided. Depending on use of an unmatched steering electrode, the bend angle of the charged particle beam may be fine-tuned, so as to effectively control the deflection of the charged particle beam to achieve a centered beam at the wafer plane.

Abstract translation: 提供了用于控制带电粒子束的偏转的单个弯曲能量过滤器。 它包括第一电极阵列和第二电极阵列，以限定用于带电粒子束通过的束通道; 用于调整带电粒子束的弯曲角度的第一电极阵列中的不匹配的转向电极; 以及施加到第一电极阵列，第二电极阵列和不匹配的转向电极的多个电偏压，其中部分或全部电极具有不同的形状。 还提供了一种用于控制带电粒子束的偏转的方法。 根据使用不匹配的转向电极，可以微调带电粒子束的弯曲角度，以便有效地控制带电粒子束的偏转以在晶片平面上实现中心的光束。