公开(公告)号：US20240407089A1

公开(公告)日：2024-12-05

申请号：US18804505

申请日：2024-08-14

Applicant: AGC INC.

Inventor： Kent SUGA ,  Hidetoshi MATSUMOTO ,  Katsuaki MIYATANI

IPC: H05K1/03 ,  C03B19/14 ,  C03C11/00 ,  H01L23/15

Abstract: The present invention relates to a silica glass substrate including: a first main surface and a second main surface that are facing each other, in which the silica glass substrate has a density of 2.0 g/cm3 or less, the silica glass substrate includes a plurality of bubbles, the silica glass substrate has an average diameter of first recessed portions of 30 μm or less, the first recessed portions being formed by the bubbles exposed on the first main surface, and the silica glass substrate has the number of the first recessed portions of 200/mm2 or less on the first main surface.