公开(公告)号：US20230183130A1

公开(公告)日：2023-06-15

申请号：US18059034

申请日：2022-11-28

Applicant: AGC Inc.

Inventor： Mamoru ISOBE ,  Kohei HORIUCHI ,  Katsuaki MIYATANI ,  Naoki UEMURA ,  Akiko OSAKI

IPC: C03C23/00 ,  C03C15/00 ,  C03C19/00

CPC classification number: C03C23/0025 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0075

Abstract: A method of manufacturing a glass substrate having a penetrating structure, the method includes: (1) preparing a glass substrate that has a first surface and a second surface opposite to each other, and includes 3 mol % to 30 mol % of B2O3 in terms of oxide; (2) having the glass substrate irradiated with a laser from a first surface side, to form an initial penetrating structure; (3) wet etching the glass substrate having the initial penetrating structure formed; (4) polishing the wet-etched glass substrate from the first surface side, by using an abrasive including acid-soluble abrasive grains; and (5) cleaning the glass substrate with an acid solution.