公开(公告)号：US20220037605A1

公开(公告)日：2022-02-03

申请号：US17451675

申请日：2021-10-21

Applicant: AGC Inc.

Inventor： Satoru WATANABE ,  Yoshitake TODA ,  Kunio MASUMO ,  Nao ISHIBASHI ,  Nobuhiro NAKAMURA ,  Shimpei MORITA ,  Hikaru KOBAYASHI

IPC: H01L51/50 ,  H01L51/56 ,  H01L51/00

Abstract: An assembly of nanoparticles includes metal oxide, the nanoparticles including zinc (Zn) and silicon (Si). In addition, the nanoparticles have an atomic ratio of Zn/(Zn+Si) in a range of 0.3 to 0.95. Further, the nanoparticles have an equivalent circular particle diameter in a range of 1 nm to 20 nm.