BROADBAND TUNABLE THZ WAVE MANIPULATOR AND THE METHOD TO FORM THE SAME

    公开(公告)号:US20190025613A1

    公开(公告)日:2019-01-24

    申请号:US16040726

    申请日:2018-07-20

    Abstract: A semiconductor device includes a semiconductor substrate having a metasurface layer configured with multiple pairs of finger portions in a repeating arrangement. The multiple pairs of finger portions are electrically configurable to modulate a radiation signal received by the semiconductor device. Each pair of finger portions includes first and second members where the first member is doped with a first dopant and the second member is doped with a second dopant being different to the first dopant. Any two adjacent first or second members are configured to be separated by at least deep subwavelength to enable the repeating arrangement.

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