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公开(公告)号:US20180193849A1
公开(公告)日:2018-07-12
申请号:US15739695
申请日:2016-06-22
Applicant: AGENCY FOR SCIENCE. TECHNOLOGY AND RESEARCH
Inventor: Meysam SHARIFZADEH MIRSHEKARLOO , Kui YAO , Szu Cheng LAI , Chee Kiang Ivan TAN , Lei ZHANG
IPC: B05B1/08 , H01L41/083 , H01L41/187 , H02N2/04 , H02N2/06
CPC classification number: B05B1/083 , H01L41/083 , H01L41/1875 , H02N2/043 , H02N2/067
Abstract: A fluid jet dispenser using at least two multilayer piezoelectric actuators is provided. The fluid jet dispenser includes a dispensing head and an electrical driver. The dispensing head includes at least two d31-mode multilayer piezoelectric actuators, a displacement magnifying element mechanically coupled to the d31-mode multilayer piezoelectric actuators, a piston, and a nozzle. More preferably, the two d31-mode multilayer piezoelectric actuators operate in an anti-phase condition. The electrical driver is electrically coupled to the d31-mode multilayer piezoelectric actuators for displacing the actuators in directions substantially perpendicular to polarization of piezoelectric layers in the d31-mode multilayer piezoelectric actuators in response to charging and discharging of the actuators by the electrical driver, to generate a fast movement of the piston to jet a pressurized fluid out of the nozzle of the dispensing head.