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1.发明授权
公开(公告)号：US3168418A
公开(公告)日：1965-02-02
申请号：US18289962
申请日：1962-03-27
Applicant: ALLOYD ELECTRONICS
Inventor： PAYNE JR PAUL R
IPC: C23C14/54 , H01J37/304 , H01J41/04
CPC classification number: H01J37/304 , C23C14/544 , H01J41/04
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