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    Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges
    2.
    发明申请
    Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges 审中-公开
    漏电流检测和离子化测量中的去污设备及方法

    公开(公告)号：US20170010171A1

    公开(公告)日：2017-01-12

    申请号：US14795706

    申请日：2015-07-09

    Applicant: MKS Instruments, Inc.

    Inventor： Stephen C. Blouch ,  Paul C. Arnold ,  Gerardo A. Brucker ,  Wesley J. Graba ,  Douglas C. Hansen

    IPC: G01L21/32

    CPC classification number: G01L21/32 ,  H01J41/04

    Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.

    Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。

    Penning vacuum meter
    3.
    发明授权
    Penning vacuum meter 有权
    Penning真空计

    公开(公告)号：US06285192B1

    公开(公告)日：2001-09-04

    申请号：US09403193

    申请日：1999-10-14

    Applicant: Werner Grosse Bley ,  Gerhard Kuster

    Inventor： Werner Grosse Bley ,  Gerhard Kuster

    IPC: G01L2130

    CPC classification number: H01J41/04 ,  G01L21/34

    Abstract: The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.

    Abstract translation: 本发明涉及一种Penning真空计（1），包括阴极和阳极。 根据本发明，阴极（11）至少主要由钛构成，以避免阴极分解的不利影响。

    Miniature ionization gauge utilizing multiple ion collectors
    4.
    发明授权
    Miniature ionization gauge utilizing multiple ion collectors 有权

    公开(公告)号：US6046456A

    公开(公告)日：2000-04-04

    申请号：US276985

    申请日：1999-03-26

    Applicant: Daniel Granville Bills

    Inventor： Daniel Granville Bills

    IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32

    CPC classification number: H01J41/04

    Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

    Vacuum gauge
    5.
    发明授权
    Vacuum gauge 失效
    真空计

    公开(公告)号：US4636680A

    公开(公告)日：1987-01-13

    申请号：US497581

    申请日：1983-05-24

    Applicant: Daniel G. Bills ,  Paul C. Arnold ,  Stephen L. Dodgen ,  Craig B. Van Cleve

    Inventor： Daniel G. Bills ,  Paul C. Arnold ,  Stephen L. Dodgen ,  Craig B. Van Cleve

    IPC: G01L21/32 ,  H01J41/04 ,  A47B5/00

    CPC classification number: H01J41/04

    Abstract: An ionization gauge of the type including a source of electrons, an accelerating electrode for accelerating said electrons through a volume generally defined by said accelerating electrode and a collector electrode, disposed in the volume. Ions are collected by the collector electrode. The accelerating electrode comprises a substantially closed anode having an internal cavity to precisely define the volume. An aperture is disposed to admit said electrons from the source into the closed volume.

    Abstract translation: 包括电子源的类型的电离计，用于加速所述电子通过由所述加速电极大致限定的体积的加速电极和设置在体积中的集电极。 离子由收集极收集。 加速电极包括具有内腔的基本封闭的阳极以精确地限定体积。 孔被设置成允许所述电子从源进入封闭的体积。

    Method of determining the x-ray limit of an ion gauge
    6.
    发明授权
    Method of determining the x-ray limit of an ion gauge 失效
    确定离子计的X射线极限的方法

    公开(公告)号：US4302679A

    公开(公告)日：1981-11-24

    申请号：US064594

    申请日：1979-08-07

    Applicant: David Edwards, Jr. ,  Christopher P. Lanni

    Inventor： David Edwards, Jr. ,  Christopher P. Lanni

    IPC: G01L21/32 ,  H01J41/04 ,  B01D59/44 ,  H01J49/26

    CPC classification number: G01L21/32 ,  H01J41/04

    Abstract: An ion gauge having a reduced "x-ray limit" and means for measuring that limit. The gauge comprises an ion gauge of the Bayard-Alpert type having a short collector and having means for varying the grid-collector voltage.The "x-ray limit" (i.e. the collector current resulting from x-rays striking the collector) may then be determined by the formula: ##EQU1## where: I.sub.x ="x-ray limit",I.sub.l and I.sub.h =the collector current at the lower and higher grid voltage respectively; and,.alpha.=the ratio of the collector current due to positive ions at the higher voltage to that at the lower voltage.

    Abstract translation: 具有减小的“X射线极限”的离子计和用于测量该极限的装置。 该量规包括具有短集电极的Bayard-Alpert型离子计，并具有用于改变集电极电压的装置。 然后可以通过以下公式确定“x射线极限”（即，从x射线撞击到集电器的集电极电流），其中：Ix =“x射线极限”，Il和Ih =集电极电流 分别在较低和较高的电网电压; 并且α=在较高电压下由于正离子引起的集电极电流与在较低电压下的集电极电流的比率。

    Method and apparatus for measuring, by ionization, the flux of vapour emitted during vacuum vaporization
    7.
    发明授权
    Method and apparatus for measuring, by ionization, the flux of vapour emitted during vacuum vaporization 失效
    通过离子化测定在真空蒸发期间发射的蒸气的通量的方法和装置

    公开(公告)号：US3842267A

    公开(公告)日：1974-10-15

    申请号：US33053773

    申请日：1973-02-07

    Applicant: BATTELLE DEVELOPMENT CORP

    Inventor： GENEQUAND P

    IPC: C23C14/54 ,  G01B15/00 ,  G01F1/64 ,  G01N27/64 ,  H01J41/04 ,  H01J49/30 ,  H01J39/34

    CPC classification number: G01F1/64 ,  H01J41/04 ,  H01J49/30

    Abstract: A method and apparatus for measuring, by ionization, the flux of vapour emitted by a substance subjected to vacuum vaporization, whereby a jet is produced within the vapour, and part of the particles contained in the jet are ionized. An essentially uniform magnetic field is produced in a volume crossed by the jet and is directed essentially perpendicularly to the jet, so that a section of the jet is permanently immersed in the magnetic field. The particles contained in a delimited volume situated within this section are ionized through being subjected to the action of at least one pulse of an ionizing radiation, so that the ionized particles constitute a package of ions describing, under the influence of the magnetic field, a circular trajectory. The amplitude of the variable component of the electric influence is measured which the package of ions exercises in the course of its revolutions along the circular trajectory on an electrode situated externally to the trajectory, the amplitude forming the measure of the flux.

    Abstract translation: 通过离子化测量由真空蒸发的物质发射的蒸汽通量的方法和装置，由此在蒸气中产生射流，并且包含在射流中的部分颗粒被电离。 在由射流交叉的体积中产生基本上均匀的磁场，并且基本上垂直于射流引导，使得一部分射流永久地浸没在磁场中。 包含在位于该部分内的限定体积中的颗粒通过经受电离辐射的至少一个脉冲的作用而离子化，使得离子化的颗粒构成离子的包装，其描述在磁场的影响下 循环轨迹。 测量电影响的可变分量的幅度，其离子包在其位于轨迹外部的电极上的圆形轨迹的旋转过程中运动，振幅形成通量的测量。

    Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
    8.
    发明授权
    Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode 失效
    具有用于形成阴极电位的电场的电极的热阴极离子浓度计

    公开(公告)号：US3743876A

    公开(公告)日：1973-07-03

    申请号：US3743876D

    申请日：1969-10-07

    Applicant: CANADIAN PATENTS DEV

    Inventor： REDHEAD P

    IPC: H01J41/04 ,  H01J7/16

    CPC classification number: H01J41/04

    Abstract: A hot-cathode ionization gauge of the Bayard Alpert type having a central ion collector, a cylindrical grid surrounding the ion collector, a cathode for producing electrons positioned outside the grid, and a cathode-shield which when carrying a suitable voltage will shape the electric field gradient in the vicinity of the cathode such that electrons produced by the cathode will be launched into paths generally towards the ionizing volume of the gauge defined by the grid.

    Abstract translation: 具有中心离子收集器的Bayard Alpert型热阴极电离计，围绕离子收集器的圆柱形栅格，用于产生位于栅极外部的电子的阴极，以及当承载合适的电压时将形成电气的阴极屏蔽 阴极附近的场梯度，使得由阴极产生的电子将通常朝着由栅格限定的量规的电离体积引入路径。

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