公开(公告)号：US20130207673A1

公开(公告)日：2013-08-15

申请号：US13851795

申请日：2013-03-27

Applicant: ALPS ELECTRIC CO., LTD.

Inventor： Atsushi TONDOKORO ,  Satoshi WAGA ,  Takashi SATO ,  Shinya YOKOYAMA ,  Sumihito MORITA

IPC: G01N27/22

CPC classification number: G01N27/223 ,  G01N1/00 ,  G01N2201/00 ,  H01L21/00 ,  Y10T29/49

Abstract: A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.

Abstract translation: 湿度检测传感器包括设置在板上的下电极，设置成面向下电极的上电极，至少形成在下电极和上电极之间并且其介电常数响应于 湿度和设置成覆盖上电极的保护膜。 上部电极和保护膜中的每一个具有开口，湿度感测膜通过该开口部分地暴露于外部。 在开口中，湿度感测膜被设置成至少达到比保护膜的下表面的位置更高的位置。