公开(公告)号：US3890535A

公开(公告)日：1975-06-17

申请号：US29659472

申请日：1972-10-11

Applicant: ANVAR

Inventor： GAUTHERIN GUY ,  AUBERT JEAN

IPC: H01J27/10 ,  H01J37/08 ,  H05H1/00

CPC classification number: H01J27/10

Abstract: The ion source comprises a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, and by an intermediate electrode enclosing the arc in proximity to an extraction orifice pierced in the anode. Magnetic field creating means are provided between the intermediate electrode and the extraction orifice, which has a relative small crosssection so that the pressure of the gases occurring inside the primary plasma generator is independent of the pressure existing downstream of the extraction orifice. This pressure downstream of extraction orifice is less than the pressure inside the primary plasma generator. On the downstream side there is an extraction electrode. A fifth electrode is arranged downstream of the extraction orifice of the anode and upstream of the extraction electrode and means are provided for applying to this fifth electrode a positive potential with respect to that of the anode and of adjustable value, which is small in absolute value with respect to the potential of the extraction electrode.

Abstract translation: 离子源包括由热阴极和阳极构成的初级等离子体发生器，在其间产生电弧，以及通过在阳极中刺穿的抽吸孔附近包围弧的中间电极。 磁场产生装置设置在中间电极和抽出孔之间，其具有相对小的横截面，使得在一次等离子体发生器内部发生的气体的压力与提取孔下游的压力无关。 提取孔下游的压力小于初级等离子体发生器内部的压力。 在下游侧有一个提取电极。 第五电极布置在阳极的提取孔的下游和提取电极的上游，并且提供装置用于向该第五电极施加相对于阳极的正电位和绝对值小的可调整值 相对于提取电极的电位。