公开(公告)号：US20190211442A1

公开(公告)日：2019-07-11

申请号：US16232496

申请日：2018-12-26

Applicant: APPLIED MATERIALS, INC.

Inventor： ALEXANDER LERNER ,  KIM VELLORE ,  AMI SADE ,  STEVEN SANSONI ,  ANDREW CONSTANT ,  KEVIN MORAES ,  ROEY SHAVIV ,  NIRANJAN KUMAR ,  JEFFREY BRODINE ,  MICHAEL KARAZIM

IPC: C23C14/50 ,  C23C14/24 ,  C23C14/04

CPC classification number: C23C14/50 ,  C23C14/042 ,  C23C14/24

Abstract: Substrate carrier apparatus having a hard mask are disclosed herein. In some embodiments, a substrate carrier apparatus includes a carrier body having a support surface to support a substrate; and a mask assembly disposed above the support surface. The mask assembly includes an annular frame disposed atop the support surface; and a hard mask coupled to and disposed within the annular frame above the support surface, wherein the hard mask includes one or more openings arranged in a predetermined pattern and disposed through the hard mask, and wherein the hard mask includes a plurality of spacer elements extending from a bottom surface of the hard mask.