公开(公告)号：US10431489B2

公开(公告)日：2019-10-01

申请号：US14554945

申请日：2014-11-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Pulkit Agarwal ,  Song-Moon Suh ,  Glen Mori ,  Steven V. Sansoni

IPC: H01L21/687 ,  B25J15/00 ,  B25J11/00

Abstract: Embodiments of apparatus for supporting a substrate are disclosed herein. In some embodiments, an apparatus for supporting a substrate includes: a support surface; and a plurality of substrate contact elements protruding from the support surface, wherein the plurality of substrate contact elements are formed of a material having a hardness less than or equal to a hardness of silicon, having a low adhesion, having a coefficient of static friction large enough to prevent sliding, having a surface roughness less than or equal to 10 Ra, and that is electrically conductive.

公开(公告)号：US11348823B2

公开(公告)日：2022-05-31

申请号：US16405414

申请日：2019-05-07

Applicant: APPLIED MATERIALS, INC.

Inventor： Steven V. Sansoni ,  Jeffrey Brodine ,  Glen Mori

IPC: H01L21/677 ,  H01L21/687

Abstract: Substrate transfer robot blades used to engage and support a substrate during transfer include a blade body having a blade support surface and at least one pad having a top surface and an opposite bottom surface, a central opening extending from the top surface to the bottom surface, and a resilient portion formed from the at least one pad. The resilient portion formed from the at least one pad extends from and cantilevers from a side surface of the central opening of the at least one pad that is disposed directly on the side surface at the end of a long axis of the resilient portion. The resilient portion further includes a curved substrate contact surface on an outermost end of the resilient portion on which a substrate is supported when disposed on the substrate transfer robot blade.

公开(公告)号：US10312127B2

公开(公告)日：2019-06-04

申请号：US14487904

申请日：2014-09-16

Applicant: APPLIED MATERIALS, INC.

Inventor： Steven V. Sansoni ,  Jeffrey Brodine ,  Glen Mori

IPC: H01L21/687 ,  H01L21/677

Abstract: Embodiments of substrate transfer robot blades to engage and support a substrate during transfer are provided herein. In some embodiments, a substrate transfer robot may include a blade body having a blade support surface; and a plurality of compliant pads, each comprising a contact surface and an opposite bottom surface supported by the body and arranged to support a substrate when disposed on the substrate transfer robot blade.

公开(公告)号：US09425076B2

公开(公告)日：2016-08-23

申请号：US14476224

申请日：2014-09-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Pulkit Agarwal ,  Daniel Greenberg ,  Song-Moon Suh ,  Jeffrey Brodine ,  Steven V. Sansoni ,  Glen Mori

IPC: B66F19/00 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/67766

Abstract: Embodiments of apparatus for supporting a substrate are disclosed herein. In some embodiments, an apparatus for supporting a substrate includes a support member; and a plurality of substrate contact elements protruding from the support member, wherein each of the plurality of substrate contact elements includes: a first contact surface to support a substrate when placed thereon; and a second contact surface extending from the first contact surface, wherein the second contact surface is adjacent a periphery of the substrate to prevent radial movement of the substrate, wherein the first contact surface is at a first angle with respect to the support member and the second contact surface is at a second angle with respect to the support member, and wherein the first angle is between about 3 degrees and 5 degrees.

Abstract translation: 本文公开了用于支撑衬底的装置的实施例。 在一些实施例中，用于支撑衬底的装置包括支撑构件; 以及从所述支撑构件突出的多个基板接触元件，其中所述多个基板接触元件中的每一个包括：当放置在其上时支撑基板的第一接触表面; 以及从所述第一接触表面延伸的第二接触表面，其中所述第二接触表面邻近所述衬底的周边以防止所述衬底的径向移动，其中所述第一接触表面相对于所述支撑构件处于第一角度， 第二接触表面相对于支撑构件处于第二角度，并且其中第一角度在约3度和5度之间。