公开(公告)号：US10053778B2

公开(公告)日：2018-08-21

申请号：US14337131

申请日：2014-07-21

Applicant: APPLIED MATERIALS, INC.

Inventor： Vijay D. Parkhe ,  Kurt J Ahmann ,  Matthew C Tsai ,  Steve Sansoni

IPC: H01L21/683 ,  C23C16/00 ,  C23C16/46 ,  H01L21/687

CPC classification number: C23C16/463 ,  H01L21/6831 ,  H01L21/6875 ,  H01L21/68757 ,  Y10T279/23

Abstract: A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.