公开(公告)号：US20180047544A1

公开(公告)日：2018-02-15

申请号：US15673403

申请日：2017-08-09

Applicant: APPLIED MATERIALS, INC.

Inventor： ANDREW NGUYEN ,  XUE YANG CHANG ,  HAITAO WANG ,  KEI-YU KO ,  REZA SADJADI

IPC: H01J37/32

Abstract: Process chambers having a tunable showerhead and a tunable liner are disclosed herein. In some embodiments, a processing chamber includes a showerhead; a chamber liner; a first impedance circuit coupled to the showerhead to tune an impedance of the showerhead; a second impedance circuit coupled to the chamber liner to tune an impedance of the chamber liner; and a controller coupled to the first and second impedance circuits to control relative impedances of the showerhead and the chamber liner.