公开(公告)号：US20210183657A1

公开(公告)日：2021-06-17

申请号：US16718029

申请日：2019-12-17

Applicant: APPLIED MATERIALS, INC.

Inventor： DAVID W. GROECHEL ,  MICHAEL R. RICE ,  GANG GRANT PENG ,  RUI CHENG ,  ZUBIN HUANG ,  HAN WANG ,  KARTHIK JANAKIRAMAN ,  DIWAKAR KEDLAYA ,  PAUL L. BRILLHART

IPC: H01L21/285 ,  H01L21/67

Abstract: Methods and apparatus for surface profiling and texturing of chamber components for use in a process chamber, such surface-profiled or textured chamber components, and method of use of same are provided herein. In some embodiments, a method includes measuring a parameter of a reference substrate or a heated pedestal using one or more sensors and modifying a surface of a chamber component based on the measured parameter.