公开(公告)号：US20160189938A1

公开(公告)日：2016-06-30

申请号：US14960890

申请日：2015-12-07

Applicant: APPLIED MATERIALS, INC.

Inventor： KIRANKUMAR SAVANDAIAH ,  RYAN HANSON ,  RUXIAO AN

IPC: H01J37/34

Abstract: Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.

Abstract translation: 本文提供了处理套件屏蔽和结合相同处理室的实施例。 在一些实施例中，一体式加工套件护罩包括具有上部和下部的圆筒体; 延伸穿过上部的传热通道; 以及从下部径向向内延伸的盖环部。