公开(公告)号：US20210351021A1

公开(公告)日：2021-11-11

申请号：US16870438

申请日：2020-05-08

Applicant: APPLIED MATERIALS, INC.

Inventor： Fernando SILVEIRA ,  Richard FOVELL ,  Chunlei ZHANG

IPC: H01J37/32

Abstract: Methods and apparatus of controlling a temperature of components in a process chamber that is heated by a plasma or a heater and cooled by a coolant flow through a heat exchanger. An apparatus, for example, can include a chuck assembly and/or a plasma source including a respective cooling plate; a proportional bypass valve connected between the respective cooling plate and a heat exchanger; a temperature sensor configured to measure a temperature of the coolant through the outlet channel of the respective cooling plate; and a controller that receives a measured temperature from the temperature sensor measuring, and in response to receiving the measured temperature controls a rate of flow of the coolant through the first coolant output line and the second coolant output line of the proportional bypass valve.