公开(公告)号：US20190326154A1

公开(公告)日：2019-10-24

申请号：US16383772

申请日：2019-04-15

Applicant: APPLIED MATERIALS, INC.

Inventor： CHENG-HSIUNG TSAI ,  ANANTHKRISHNA JUPUDI ,  SARATH BABU

IPC: H01L21/687 ,  H01L21/673 ,  H01L21/677 ,  H01L21/68 ,  C23C14/50

Abstract: Two-piece shutter disk assemblies for use in process chambers are provided herein. In some embodiments, a shutter disk assembly for use in a process chamber includes an upper disk member having a top surface and a bottom surface, wherein a central alignment recess is formed in a center of the bottom surface, and a lower carrier member having a solid base having an upper support surface, wherein the upper support surface includes a first central self-centering feature disposed in the recess formed in the center of the bottom surface and an annular outer alignment feature that protrudes upward from a top surface of the lower carrier and forms a pocket, wherein the upper disk member is disposed in the pocket.

公开(公告)号：US20190316251A1

公开(公告)日：2019-10-17

申请号：US15950726

申请日：2018-04-11

Applicant: APPLIED MATERIALS, INC.

Inventor： CHENG-HSIUNG TSAI ,  ANANTHKRISHNA JUPUDI ,  EIJI ASAHINA ,  SARATH BABU

IPC: C23C14/52 ,  C23C14/56 ,  C23C14/54 ,  C23C14/02

Abstract: Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.