公开(公告)号：US20210335571A1

公开(公告)日：2021-10-28

申请号：US16859974

申请日：2020-04-27

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ilya Blayvas ,  Gal Bruner ,  Yehuda Zur ,  Alexander Mairov ,  Ron Davidescu ,  Kfir Dotan ,  Alon Litman

IPC: H01J37/305 ,  G01N1/32

Abstract: A method of evaluating a region of a sample that includes alternating layers of different material. The method includes milling, with a focused ion beam, a portion of the sample that includes the alternating layers of different material; reducing the milling area; and repeating the milling and reducing steps multiple times during the delayering process until the process is complete.

公开(公告)号：US11315754B2

公开(公告)日：2022-04-26

申请号：US16859974

申请日：2020-04-27

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ilya Blayvas ,  Gal Bruner ,  Yehuda Zur ,  Alexander Mairov ,  Ron Davidescu ,  Kfir Dotan ,  Alon Litman

IPC: G01N1/32 ,  H01J37/305

Abstract: A method of evaluating a region of a sample that includes alternating layers of different material. The method includes milling, with a focused ion beam, a portion of the sample that includes the alternating layers of different material; reducing the milling area; and repeating the milling and reducing steps multiple times during the delayering process until the process is complete.