公开(公告)号：US10541104B2

公开(公告)日：2020-01-21

申请号：US14795793

申请日：2015-07-09

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Uri Lev ,  Alon Litman ,  Zvi Nir ,  Arnon Mizrahy

IPC: H01J37/28 ,  H01J37/147

Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

公开(公告)号：US20170011883A1

公开(公告)日：2017-01-12

申请号：US14795793

申请日：2015-07-09

Applicant: Applied Materials Israel, Ltd.

Inventor： Uri Lev ,  Alon Litman ,  Zvi Nir ,  Arnon Mizrahy

IPC: H01J37/28 ,  H01J37/20

Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

Abstract translation: 一种包括带电粒子束光学器件和可动载物台的方法和带电粒子束系统; 其中所述可移动台被配置为引入所述物体和带电粒子束光学器件之间的运动; 其中所述运动具有恒定的速度并沿着第一方向; 其中所述带电粒子束光学器件被配置为通过所述带电粒子束来扫描所述物体的多个区域，使得所述多个区域中的每个点被多次扫描; 其中所述多个区域部分重叠; 其中扫描由带电粒子束光学器件执行; 其中所述扫描包括执行所述带电粒子束的反向偏移以至少部分补偿所述运动; 并且其中通过遵循定义多个彼此不同的扫描线的区域扫描方案来扫描多个区域中的每个区域。