Abstract:
A semiconductor system including a semiconductor wafer is provided on at least one side with cooling means formed of a container having a movable wall facing the semiconductor system into which a cooling fluid is fed in such a way as to maintain a substantial pressure in the container to press the movable wall against the semiconductor device.
Abstract:
A semiconductor device comprises semiconductor elements arranged side by side and provided with hollow cooling bodies. The cooling bodies are joined to each other by a connection conduit for the coolant which is flexible and which insulates the cooling bodies from each other electrically. The connection conduit comprises a tube of insulating inorganic material and a bellows of metallic material fixed to each end of the tube.