公开(公告)号：US10738382B2

公开(公告)日：2020-08-11

申请号：US14777945

申请日：2014-03-18

Applicant: ASM INTERNATIONAL N.V.

Inventor： Ernst Hendrik August Granneman ,  Pieter Tak

IPC: C23C16/455 ,  H01L21/677 ,  B65G51/03 ,  C23C16/54 ,  C23C16/44

Abstract: A substrate processing apparatus (100) comprising a process tunnel (102) including a lower tunnel wall (122), an upper tunnel wall (142), and two lateral tunnel walls (128), said tunnel walls being configured to bound a process tunnel space (104) that extends in a longitudinal transport direction (7) and that is suitable for accommodating at least one substantially planar substrate (180) oriented parallel to the upper and lower tunnel walls (122, 142), the process tunnel being divided in a lower tunnel body (120) comprising the lower tunnel wall and an upper tunnel body (140) comprising the upper tunnel wall, which tunnel bodies (120, 140) are separably joinable to each other along at least one longitudinally extending join (160), such that they are mutually movable between a closed configuration in which the tunnel walls (122, 128, 142) bound the process tunnel space (104) and an open configuration that enables lateral maintenance access to an interior of the process tunnel.

公开(公告)号：US20160281233A1

公开(公告)日：2016-09-29

申请号：US14777945

申请日：2014-03-18

Applicant: ASM INTERNATIONAL N.V.

Inventor： Ernst Hendrik August Granneman ,  Pieter Tak

IPC: C23C16/455 ,  C23C16/44 ,  H01L21/677

Abstract: A substrate processing apparatus (100) comprising a process tunnel (102) including a lower tunnel wall (122), an upper tunnel wall (142), and two lateral tunnel walls (128), said tunnel walls being configured to bound a process tunnel space (104) that extends in a longitudinal transport direction (7) and that is suitable for accommodating at least one substantially planar substrate (180) oriented parallel to the upper and lower tunnel walls (122, 142), the process tunnel being divided in a lower tunnel body (120) comprising the lower tunnel wall and an upper tunnel body (140) comprising the upper tunnel wall, which tunnel bodies (120, 140) are separably joinable to each other along at least one longitudinally extending join (160), such that they are mutually movable between a closed configuration in which the tunnel walls (122, 128, 42) bound the process tunnel space (104) and an open configuration that enables lateral maintenance access to an interior of the process tunnel.

Abstract translation: 一种衬底处理设备（100），包括一个包括下部隧道壁（122），上部隧道壁（142）和两个横向隧道壁（128）的工艺隧道（102），所述隧道壁被构造成将工艺隧道 空间（104），其沿纵向输送方向（7）延伸并且适于容纳平行于上部和下部隧道壁（122,142）定向的至少一个基本平坦的基板（180），所述过程隧道被分割成 包括下部隧道壁的下部隧道主体（120）和包括上部隧道壁的上部隧道主体（140），所述隧道主体（120,140）沿着至少一个纵向延伸的连接（160）可分离地彼此连接， 使得它们在其中结合了过程管道空间（104）的隧道壁（122,128,42）和允许侧向维护进入过程管道内部的打开构造的关闭构造之间可相互移动。