公开(公告)号：US20250079223A1

公开(公告)日：2025-03-06

申请号：US18817440

申请日：2024-08-28

Applicant: ASM IP Holding B.V.

Inventor： Shubham Garg ,  Hang Zhang ,  Todd Robert Dunn ,  George B. Jackson

IPC: H01L21/683

Abstract: Various embodiments of the present technology may provide a susceptor assembly. The susceptor assembly may include a susceptor plate and a cap disposed on a surface of the susceptor plate. The cap may have electrodes embedded within it. The susceptor plate may have heating elements embedded within it. The cap may be separated from the susceptor plate by an air gap formed by a plurality of dielectric spacers. The plurality of dielectric spacers may be sized for minimal contact on the cap.

公开(公告)号：USD1071715S1

公开(公告)日：2025-04-22

申请号：US29856099

申请日：2022-10-11

Applicant: ASM IP Holding B.V.

Designer： George B. Jackson