公开(公告)号：US20240376597A1

公开(公告)日：2024-11-14

申请号：US18660759

申请日：2024-05-10

Applicant: ASM IP Holding B.V.

Inventor： Fan Gao ,  Krishnaswamy Mahadevan ,  Peipei Gao ,  Xing Lin ,  Jingxuan Lyu

IPC: C23C16/448 ,  C23C16/52 ,  C30B25/14 ,  H01L21/02

Abstract: A liquid precursor container is provided. The liquid precursor container includes an inner container, an outer container, and a baffle member. The inner container has an inner base portion, an inner intermediate portion extending upwards from the inner base portion, and an inner lid portion coupled to the inner base portion by the inner intermediate portion. The outer container has an outer base portion spaced apart from the inner base portion of the inner container and an outer intermediate portion extending upwards from the outer base portion and about the inner intermediate portion of the inner container. The baffle member is arranged between the inner intermediate portion of the inner container and the outer intermediate portion of the outer container, extends upwards from the outer base portion of the outer container, and terminates between the inner lid portion and the inner base portion of the inner container.