公开(公告)号：US20230034114A1

公开(公告)日：2023-02-02

申请号：US17961882

申请日：2022-10-07

申请人： ASM IP Holding B.V.

发明人： KiHyun Kim ,  Sam Kim ,  Rutvij Naik

IPC分类号： H01L21/687 ,  B65G47/90

摘要： An adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.

公开(公告)号：US20220243324A1

公开(公告)日：2022-08-04

申请号：US17584724

申请日：2022-01-26

申请人： ASM IP Holding B.V.

发明人： KiHyun Kim

IPC分类号： C23C16/458 ,  C23C16/44

摘要： A fixture, for example, comprised in a semiconductor processing system, includes a standoff arranged for fixation relative to a reaction chamber of a semiconductor processing system. A slide member is slidably supported by the standoff and is translatable along a carrying axis extending into the reaction chamber. A male threaded member depends from the slide member and is rotatable about a seating axis that is angled relative to the carrying axis. A paddle member depends from the male threaded member, defines along the carrying axis, is fixed relative to slide member along the carrying axis to carry a component of a process kit into the reaction chamber using translation of the slide member, and is free relative to the slide member along the seating axis to seat the process kit component within the reaction chamber using rotation of the male threaded member.

公开(公告)号：US11488854B2

公开(公告)日：2022-11-01

申请号：US17189787

申请日：2021-03-02

申请人： ASM IP Holding B.V.

发明人： KiHyun Kim ,  Sam Kim ,  Rutvij Naik

IPC分类号： H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B65G47/90

摘要： An adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.

公开(公告)号：US20210287928A1

公开(公告)日：2021-09-16

申请号：US17189787

申请日：2021-03-02

申请人： ASM IP Holding B.V.

发明人： KiHyun Kim ,  Sam Kim ,  Rutvij Naik

IPC分类号： H01L21/687 ,  B65G47/90

摘要： The present disclosure is directed to an adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.