公开(公告)号：US20230076060A1

公开(公告)日：2023-03-09

申请号：US17986113

申请日：2022-11-14

Applicant: ASM IP Holdings B.V.

Inventor： MELVIN VERBAAS ,  Christianus G.M. de Ridder

IPC: F27D3/00 ,  H01L21/67 ,  H01L21/677

Abstract: A vertical batch furnace assembly, comprising a core tube, an outer casing, a cooling chamber bounded and enclosed by the outer casing and the core tube, and at least one cooling gas supply emanating in the cooling chamber. The core tube has an elongated circumferential wall extending in a longitudinal direction, and is configured to accommodate wafers for processing in the vertical batch furnace. The outer casing extends around the core tube and comprises a heating element for applying a thermal treatment to wafers accommodated in the core tube. The at least one cooling gas supply comprises at least one cooling gas supply opening which is arranged such that the cooling gas enters the cooling chamber with a flow direction which is substantially tangent to the circumferential wall.