公开(公告)号：US20220216092A1

公开(公告)日：2022-07-07

申请号：US17608238

申请日：2020-04-21

Applicant: ASML HOLDING N.V.

Inventor： Bruce TIRRI ,  Ping ZHOU ,  Elizabeth Mary STONE ,  David Hart PETERSON ,  Mehmet Ali AKBAS ,  Ryan MAYER ,  Richard Bryan LEWIS

IPC: H01L21/687 ,  G03F7/20 ,  C23C16/513

Abstract: A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.