公开(公告)号：US20210357566A1

公开(公告)日：2021-11-18

申请号：US17281123

申请日：2019-10-08

Applicant: ASML NETHERLAND B.V.

Inventor： Mark Christopher SIMMONS ,  Chenxi LIN ,  Jen-Yi WUU

IPC: G06F30/392 ,  G03F7/20 ,  G06N3/08 ,  G06N3/04

Abstract: A method of generating a characteristic pattern for a patterning process and training a machine learning model. The method for generating the characteristic pattern includes obtaining a trained generator model configured to generate a characteristic pattern (e.g., a hot spot pattern), and an input pattern; and generating, via simulation using the trained generator model (e.g., CNN), the characteristic pattern based on the input pattern, wherein the input pattern can be a random vector and/or a class of pattern.